JPH0413048U - - Google Patents
Info
- Publication number
- JPH0413048U JPH0413048U JP5153990U JP5153990U JPH0413048U JP H0413048 U JPH0413048 U JP H0413048U JP 5153990 U JP5153990 U JP 5153990U JP 5153990 U JP5153990 U JP 5153990U JP H0413048 U JPH0413048 U JP H0413048U
- Authority
- JP
- Japan
- Prior art keywords
- target
- magnet
- substrate support
- magnetic field
- facing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 3
- 230000005684 electric field Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5153990U JPH0413048U (en]) | 1990-05-17 | 1990-05-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5153990U JPH0413048U (en]) | 1990-05-17 | 1990-05-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0413048U true JPH0413048U (en]) | 1992-02-03 |
Family
ID=31571067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5153990U Pending JPH0413048U (en]) | 1990-05-17 | 1990-05-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0413048U (en]) |
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1990
- 1990-05-17 JP JP5153990U patent/JPH0413048U/ja active Pending